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For example, the current concave OC could get replaced by a aircraft mirror which could mitigate the power density over the floor of M1 along with the diamond. In addition, making use of substantial problems threshold coatings for M1 and diamond would also improve the output power with none damages. Then, the NIR laser on the 2nd Stokes wavelength can be large enough, and also its superior beam good quality, to deliver the final DUV laser at 193 nm using a superior ordinary ability.
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Both of those the 1040 nm and 1078 nm laser come from just one dual-wavelength Yb-doped fiber laser. Each and every laser is amplified by stages of fiber amplifier and Yb-doped materials amplifier, respectively.
On another facet, the facility scaling of the NIR laser is another component to improve the regular electricity in the 193-nm DUV laser. Due to the lack of the superior-electrical power amplification Resolution of your NIR laser (one example is at 1553 nm), nonlinear frequency procedures for example optical parameter oscillation (OPO) could possibly be placed on produce a wavelength converter by shifting the wavelength from one μm to the desired wavelength and also acquiring relative higher energy [21]. Just lately, a diamond Raman laser showed its means in reaching here a higher energy as well as a substantial conversion efficiency for the 1st Stokes in the one-μm laser [22,23], which suggests the chance being applied inside the 193-nm DUV laser era because of its high Raman attain and enormous frequency shift.
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The heartbeat length of the 2nd Stokes light was shortened to 5 ns as shown in Determine 7a, a single-shot photograph with the oscilloscope, which can be a typical phenomenon in Raman laser [44] although the pulse length of the pump laser was 10 ns.
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The beam profile demonstrated in Figure 7b shown an excellent beam good quality as among the deserves of Raman laser, which might be beneficial to make a 193-nm DUV laser with a top quality beam.
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